How to solve problems in micro- and nanofabrication caused by the emission of electrons and charged metal atoms during e-beam evaporation

Volmer, Frank (Corresponding author); Seidler, Inga; Bißwanger, Timo Hendrik; Tu, Jhih-Sian; Schreiber, Lars R.; Stampfer, Christoph; Beschoten, Bernd

Bristol : IOP Publ. (2021)
Journal Article

In: Journal of physics / D
Volume: 54
Issue: 22
Page(s)/Article-Nr.: 225304

Institutions

• JARA - FIT [080009]
• Department of Physics [130000]
• Chair of Experimental Physics (Solid State Physics) and II. Institute of Physics [132110]
• Chair of Experimental Physics and Institute of Physics II [132210]