How to solve problems in micro- and nanofabrication caused by the emission of electrons and charged metal atoms during e-beam evaporation

Volmer, Frank (Corresponding author); Seidler, Inga; Bißwanger, Timo Hendrik; Tu, Jhih-Sian; Schreiber, Lars Reiner; Stampfer, Christoph; Beschoten, Bernd

Bristol / IOP Publ. (2021) [Journal Article]

Journal of physics / D
Volume: 54
Issue: 22
Page(s): 225304